MKS Mass Flow Controllers

Product Category: Mass Flow Controllers (MFCs)

Manufacturer: MKS

Control Principle: Thermal mass flow and MEMS-based flow control

Controlled Media: Air, nitrogen, hydrogen, and specialty gases

Flow Range Coverage: From 10 sccm up to 1000 slm (model dependent)

Accuracy & Repeatability: High precision with excellent long-term repeatability

Response Time: Fast to ultrafast response (series dependent)

Seal Options: Elastomer-sealed and metal-sealed configurations

Pressure Sensitivity: Standard and pressure-insensitive models available

Communications: Analog, RS485, PROFINET®, Modbus (model dependent)

Environmental Protection: Options available for harsh environments (IP66-rated)

Applications:

• Semiconductor process control

• Industrial gas regulation

• Chemical processing

• Research and development

• Automation and production systems

Product Series Overview

G-Series – Fast and Repeatable Mass Flow Controllers

Cost-effective thermal mass flow controllers with fast response and repeatable performance for general industrial and laboratory use.

• GE50A: Elastomer-sealed, 5 – 50,000 sccm

• GM50A / GM51A: Metal-sealed, 5 – 50,000 sccm

• GV50A: Elastomer-sealed with integrated shut-off valve, 5 – 50,000 sccm

• GM100A: Metal-sealed, 50 – 100 slm

• GE250A / GE300A: Elastomer-sealed, 100 – 300 slm

P-Series – High Performance Mass Flow Controllers

High-accuracy, multi-gas, multi-range MFCs designed for the most critical process applications.

• P4B: High performance MFC, 5 – 50,000 sccm

• P9B: Pressure-insensitive MFC, 5 – 50,000 sccm

C-Series – Compact, Ultrafast Mass Flow Controllers

Compact MEMS-based MFCs offering ultrafast response and advanced digital connectivity for non-corrosive gas applications.

• CMA10B: 15 – 14,000 sccm

• CMA50A: 14,000 – 50,000 sccm

– Control range: 0.1 – 100% of full scale

– Interfaces: Analog, RS485, PROFINET®, Modbus

High Flow Mass Flow Controllers

Designed for high flow rates and harsh environments, with protection against water and dust.

• GE250A / GE300A: Elastomer-sealed, 100 – 300 slm

• IE500A: IP66-rated, 250 – 500 slm

• IE1000A: IP66-rated, 500 – 1000 slm

Legacy Mass Flow Controller – 1179C Mass-Flo®

General-purpose MFC offering stable and repeatable flow control, ideal as a form-fit-function replacement.

• Flow Range: 10 sccm – 20 slm

• Key Features:

– Patented sensor design for exceptional zero stability

– Fast warm-up time to minimize downtime

– Compatible with earlier MKS MFC and power supply/readout modules

– Can operate as a pressure controller with external transducer