{"product_id":"mks-ha-mfv-high-accuracy-mass-flow-verifier","title":"MKS HA-MFV - High Accuracy Mass Flow Verifier","description":"\u003cp data-start=\"262\" data-end=\"675\"\u003eThe \u003cstrong data-start=\"266\" data-end=\"311\"\u003eHA-MFV (High Accuracy Mass Flow Verifier)\u003c\/strong\u003e is an advanced solution for \u003cstrong data-start=\"340\" data-end=\"431\"\u003ein-situ verification of mass flow controller (MFC) flow rates directly on process tools\u003c\/strong\u003e. Designed to enable precise \u003cstrong data-start=\"460\" data-end=\"525\"\u003ewafer-to-wafer, chamber-to-chamber, and tool-to-tool matching\u003c\/strong\u003e, the HA-MFV delivers \u003cstrong data-start=\"547\" data-end=\"576\"\u003e1.0% measurement accuracy\u003c\/strong\u003e using the \u003cstrong data-start=\"587\" data-end=\"609\"\u003eactual process gas\u003c\/strong\u003e, eliminating the limitations of traditional rate-of-rise methods.\u003c\/p\u003e\n\u003cp data-start=\"677\" data-end=\"1039\"\u003eBy supporting \u003cstrong data-start=\"691\" data-end=\"714\"\u003emultiple gas panels\u003c\/strong\u003e and offering a wide \u003cstrong data-start=\"735\" data-end=\"771\"\u003e5 to 3000 sccm measurement range\u003c\/strong\u003e, the HA-MFV improves process consistency while reducing implementation costs and unnecessary downtime. Its integration with \u003cstrong data-start=\"896\" data-end=\"924\"\u003eEtherCAT® and DeviceNet™\u003c\/strong\u003e communication protocols ensures seamless compatibility with modern semiconductor and advanced manufacturing tools.\u003c\/p\u003e","brand":"MKS","offers":[{"title":"Default Title","offer_id":56239012708738,"sku":"HA-MFV","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0930\/7353\/9458\/files\/mass_1.png?v=1768835632","url":"https:\/\/kriticos.com.cy\/products\/mks-ha-mfv-high-accuracy-mass-flow-verifier","provider":"C \u0026 V Kriticos Suppliers","version":"1.0","type":"link"}