MKS Mass Flow Meters

Product Category: Mass Flow Meters (MFMs)

Manufacturer: MKS

Measurement Principle: Thermal mass flow and MEMS-based sensing

Measured Media: Air, nitrogen, hydrogen, and specialty gases

Flow Range Coverage: From 10 sccm up to 1000 slm (model dependent)

Accuracy & Repeatability: High accuracy with excellent repeatability

Response Time: Fast to ultrafast response (down to <100 ms, model dependent)

Sealing Options: Metal-sealed and elastomer-sealed designs

Gas Compatibility: Multi-gas and application-specific configurations

Communications: Analog and digital interfaces (RS485, PROFINET®, Modbus TCP/IP, model dependent)

Environmental Protection: Options with IP66 rating for harsh environments

Applications:

• Semiconductor manufacturing

• Industrial gas flow monitoring

• Research and development

• Process control and automation

• Harsh and high-flow industrial environments

Product Series Overview

G-Series Mass Flow Meters

Cost-effective thermal mass flow meters with fast, repeatable performance for general industrial applications.

• GM50A / GM51A: Metal-sealed, 5 – 50,000 sccm

• GM100A: Metal-sealed, 50 – 100 slm

• GE250A: Elastomer-sealed, up to 250 slm

• GE300A: Elastomer-sealed, up to 300 slm

P-Series High Performance Mass Flow Meters

High-accuracy, multi-gas, multi-range MFMs for critical process applications requiring maximum precision.

• P4B: 5 – 50,000 sccm

• P9B: 5 – 50,000 sccm with integrated pressure transducer

C-Series Compact, Ultrafast Mass Flow Meters

Compact MEMS-based mass flow meters offering ultrafast response and advanced digital functionality.

• CMA10B: 15 – 14,000 sccm

– <100 ms response time

– Measurement range from 0.1 – 100% of full scale

– Embedded web browser for setup and diagnostics

High Flow Mass Flow Meters

Designed for high-flow and harsh environments, with protection against water and dust.

• IE500A: IP66-rated, 250 – 500 slm

• IE1000A: IP66-rated, 500 – 1000 slm

Legacy Mass Flow Meter – 179 Mass-Flo®

All-metal mass flow meter providing stable and repeatable performance, ideal as a form-fit-function replacement.

• Flow Range: 10 sccm – 20 slm

• Key Features:

– Patented sensor design for exceptional zero stability

– Accurate measurement down to 0.1 sccm

– Percent-of-full-scale accuracy (analog configurations)