MKS Flow Ratio Controllers – Precise and Uniform Distribution of Multiple Gases

Product Category: Flow Ratio Controllers (FRCs)

Series: DELTA™

Manufacturer: MKS

Primary Function: Precise division and control of gas flow ratios

Gas Handling: Single or mixed gas source split into multiple channels

Control Capability: User-defined flow ratios with high repeatability

Control Technology: Digital control loop with fast dynamic response

Performance Stability: Maintains accurate ratios despite pressure or temperature fluctuations

User Interface: Standard web browser interface (no special software required)

Design: Compact, high-performance architecture

Applications:

• Semiconductor process chambers

• Flat panel display manufacturing

• Solar cell production

• Multi-zone or multi-chamber gas distribution

Key Benefits:

• Improved process uniformity

• Enhanced repeatability and yield

• Rapid response to setpoint changes

• Simplified setup and operation

DELTA™ Series Models

DELTA™ II – 2-Zone Flow Ratio Controller

Designed to divide and control gas flow between two independent zones or chambers, ensuring precise ratio control for uniform processing.

DELTA™ III – 3-Zone Flow Ratio Controller

Provides accurate and repeatable gas distribution across three zones, ideal for more complex multi-zone process requirements.

DELTA™ IV – 4-Zone Flow Ratio Controller

Enables high-precision gas flow ratio control across four zones, supporting advanced process chambers and high-uniformity applications.