{"title":"Mass Flow Controllers \u0026 Flow Meters","description":"","products":[{"product_id":"mks-ha-mfv-high-accuracy-mass-flow-verifier","title":"MKS HA-MFV - High Accuracy Mass Flow Verifier","description":"\u003cp data-start=\"262\" data-end=\"675\"\u003eThe \u003cstrong data-start=\"266\" data-end=\"311\"\u003eHA-MFV (High Accuracy Mass Flow Verifier)\u003c\/strong\u003e is an advanced solution for \u003cstrong data-start=\"340\" data-end=\"431\"\u003ein-situ verification of mass flow controller (MFC) flow rates directly on process tools\u003c\/strong\u003e. Designed to enable precise \u003cstrong data-start=\"460\" data-end=\"525\"\u003ewafer-to-wafer, chamber-to-chamber, and tool-to-tool matching\u003c\/strong\u003e, the HA-MFV delivers \u003cstrong data-start=\"547\" data-end=\"576\"\u003e1.0% measurement accuracy\u003c\/strong\u003e using the \u003cstrong data-start=\"587\" data-end=\"609\"\u003eactual process gas\u003c\/strong\u003e, eliminating the limitations of traditional rate-of-rise methods.\u003c\/p\u003e\n\u003cp data-start=\"677\" data-end=\"1039\"\u003eBy supporting \u003cstrong data-start=\"691\" data-end=\"714\"\u003emultiple gas panels\u003c\/strong\u003e and offering a wide \u003cstrong data-start=\"735\" data-end=\"771\"\u003e5 to 3000 sccm measurement range\u003c\/strong\u003e, the HA-MFV improves process consistency while reducing implementation costs and unnecessary downtime. Its integration with \u003cstrong data-start=\"896\" data-end=\"924\"\u003eEtherCAT® and DeviceNet™\u003c\/strong\u003e communication protocols ensures seamless compatibility with modern semiconductor and advanced manufacturing tools.\u003c\/p\u003e","brand":"MKS","offers":[{"title":"Default Title","offer_id":56239012708738,"sku":"HA-MFV","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0930\/7353\/9458\/files\/mass_1.png?v=1768835632"},{"product_id":"mks-ha-mfv-high-accuracy-mass-flow-verifier-copy","title":"MKS Mass Flow Meters","description":"\u003cp data-start=\"332\" data-end=\"673\"\u003eAccurate and reliable gas flow measurement is critical for process stability, product quality, and operational efficiency across a wide range of industries. \u003cstrong data-start=\"489\" data-end=\"520\"\u003eMKS Mass Flow Meters (MFMs)\u003c\/strong\u003e provide \u003cstrong data-start=\"529\" data-end=\"580\"\u003ehigh-precision, repeatable gas flow measurement\u003c\/strong\u003e for applications ranging from research and development to high-volume industrial production.\u003c\/p\u003e\n\u003cp data-start=\"675\" data-end=\"1146\"\u003eThe MKS MFM portfolio covers a \u003cstrong data-start=\"706\" data-end=\"774\"\u003ebroad range of flow rates, gas types, and operating environments\u003c\/strong\u003e, utilizing advanced thermal and MEMS-based sensing technologies. Designed for durability and long-term stability, these meters deliver \u003cstrong data-start=\"910\" data-end=\"975\"\u003eexceptional accuracy, fast response, and reliable performance\u003c\/strong\u003e, even in demanding or harsh conditions. Whether measuring air, nitrogen, hydrogen, or specialty gases, MKS offers the right mass flow meter for your process requirements.\u003c\/p\u003e","brand":"MKS","offers":[{"title":"Default Title","offer_id":56239027749250,"sku":"MFM","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0930\/7353\/9458\/files\/mass_2.png?v=1768835903"},{"product_id":"mks-flow-ratio-controllers-precise-and-uniform-distribution-of-multiple-gases","title":"MKS Flow Ratio Controllers – Precise and Uniform Distribution of Multiple Gases","description":"\u003cp data-start=\"308\" data-end=\"697\"\u003eFor processes that require \u003cstrong data-start=\"335\" data-end=\"410\"\u003eprecise and uniform distribution of multiple gas flows within a chamber\u003c\/strong\u003e, \u003cstrong data-start=\"412\" data-end=\"456\"\u003eMKS DELTA™ Flow Ratio Controllers (FRCs)\u003c\/strong\u003e provide an advanced and reliable solution. These instruments are specifically designed to \u003cstrong data-start=\"547\" data-end=\"623\"\u003esplit and control a single mixed gas source into multiple output streams\u003c\/strong\u003e, maintaining \u003cstrong data-start=\"637\" data-end=\"676\"\u003eaccurate and repeatable flow ratios\u003c\/strong\u003e across all channels.\u003c\/p\u003e\n\u003cp data-start=\"699\" data-end=\"1115\"\u003eWidely used in \u003cstrong data-start=\"714\" data-end=\"803\"\u003esemiconductor manufacturing, flat panel display production, and solar cell processing\u003c\/strong\u003e, DELTA™ FRCs ensure optimal process uniformity and repeatability. By leveraging \u003cstrong data-start=\"884\" data-end=\"923\"\u003eadvanced digital control algorithms\u003c\/strong\u003e and \u003cstrong data-start=\"928\" data-end=\"955\"\u003erobust valve technology\u003c\/strong\u003e, they maintain precise flow ratios even under changing pressure or temperature conditions, helping improve yield, consistency, and overall process performance.\u003c\/p\u003e","brand":"MKS","offers":[{"title":"Default Title","offer_id":56239045312898,"sku":"FRC","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0930\/7353\/9458\/files\/mass_10.png?v=1768836125"},{"product_id":"mks-mass-flow-controllers","title":"MKS Mass Flow Controllers","description":"\u003cp data-start=\"307\" data-end=\"670\"\u003e\u003cstrong data-start=\"307\" data-end=\"343\"\u003eMKS Mass Flow Controllers (MFCs)\u003c\/strong\u003e deliver \u003cstrong data-start=\"352\" data-end=\"413\"\u003eprecise, stable, and repeatable control of gas flow rates\u003c\/strong\u003e for critical process applications across industry and research. Designed to meet the demanding requirements of \u003cstrong data-start=\"525\" data-end=\"606\"\u003esemiconductor manufacturing, chemical processing, and laboratory environments\u003c\/strong\u003e, MKS MFCs ensure consistent process performance and high yield.\u003c\/p\u003e\n\u003cp data-start=\"672\" data-end=\"1051\"\u003eUtilizing advanced \u003cstrong data-start=\"691\" data-end=\"743\"\u003ethermal and MEMS-based flow sensing technologies\u003c\/strong\u003e, MKS MFCs provide accurate gas flow control for \u003cstrong data-start=\"792\" data-end=\"840\"\u003eair, nitrogen, hydrogen, and specialty gases\u003c\/strong\u003e. Available in a wide range of configurations—including compact, high-performance, pressure-insensitive, and high-flow designs—the MKS portfolio offers the flexibility to match virtually any process requirement.\u003c\/p\u003e","brand":"MKS","offers":[{"title":"Default Title","offer_id":56239061631362,"sku":null,"price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0930\/7353\/9458\/files\/mass_11.png?v=1768836377"}],"url":"https:\/\/kriticos.com.cy\/collections\/furnaces-copy.oembed","provider":"C \u0026 V Kriticos Suppliers","version":"1.0","type":"link"}