MKS HA-MFV - High Accuracy Mass Flow Verifier

Product Type: Mass Flow Verifier

Model: HA-MFV (High Accuracy Mass Flow Verifier)

Application: In-situ verification of mass flow controllers (MFCs)

Primary Function: Wafer-to-wafer, chamber-to-chamber, and tool-to-tool process matching

Measurement Accuracy: ±1.0%

Measurement Range: 5 – 3000 sccm

Gas Type: Uses actual process gas

Installation: In-situ, directly on process tools

Communications: EtherCAT® and DeviceNet™

System Integration: Supports multiple gas panels

Key Benefits:

• Improved process control

• Reduced unplanned downtime

• Accurate matching across tools and chambers

• Lower implementation and calibration costs

Key Technology & Features

Sonic Flow Technology

The HA-MFV utilizes sonic nozzle technology to achieve measurement insensitivity to external volume. By establishing sonic flow conditions, downstream pressure variations do not affect upstream flow, effectively decoupling the measurement from the volume between the MFC and the verifier. This ensures stable, repeatable, and highly accurate readings.

Enhanced Measurement Accuracy

Unlike traditional methods, the HA-MFV is insensitive to external volume, enabling consistent and precise measurement matching across multiple tools running the same process. This capability is critical for achieving reliable tool-to-tool process uniformity in advanced manufacturing environments.